AJA superconducting deposition system

The AJA hybrid deposition system contains several sputtering sources in addition to an electron beam deposition source. Purchased to enable the fabrication of high quality factor superconducting resonators and Josephson junctions, the system is restricted to Nb, NbTi, NbTiN, Au and Al. The sample stage can be tilted for double-angle evaporation and heated during depositions.

Superuser:  Stefan Putz  sputz@princeton.edu