ReynoldsTech spinner hood

Electron beam lithography and photolithography resist spinning processes are segregated in the ReynoldsTech spinner hood. The left hand side of the hood is dedicated to electron beam resists (e.g. PMMA, ZEP), while the right side of the hood is dedicated to photoresists and liftoff layers (e.g. S1818, LOR5A). Hotplates are contained within the hood and a variety of spinner chucks are available.

Superuser:  Stefan Putz  sputz@princeton.edu