Heidelberg DWL66+ direct write lithography system

Laser writer for direct patterning of substrates and masks. The Heidelberg accommodates substrate thicknesses <= 625 microns, substrate diameters <= 6 inches, mask plates < = 5 x 5 inches. The system is equipped with two laser write heads. The 2 mm write head has a 500 nm minimum feature size, while the 5 mm write head has a 1 micron minimum feature size. Patterns can be aligned using the system, with a 1 micron overlay accuracy.

Superuser:  Xiao Mi  xmi@princeton.edu