The MJB4 mask aligner is a compact, flexible and high-precision alignment tool. It can print features in the submicron range, with alignment accuracy of 1 micron or better. It can handle substrates up to 100 mm in diameter and the combined thickness of the mask/substrate can be up to 9mm. Mask plates are fabricated in the QDNL using the Heidelberg DWL66+.
Superuser: Felix Borjans email@example.com